化工儀器網(wǎng)
技術(shù)文章
4020系列BIRD功率傳感器原理結(jié)構(gòu)
閱讀：336 發(fā)布時間：2024-12-234020系列BIRD功率傳感器原理結(jié)構(gòu)
感應(yīng)器把某種形式的能量轉(zhuǎn)換成另一種形式的能量。有兩類:有源的和無源的。
有源感應(yīng)器能將一種能量形式直接轉(zhuǎn)變成另一種，不需要外接的能源或激勵源。
無源感應(yīng)器不能直接轉(zhuǎn)換能量形式，但它能控制從另一輸入端輸入的能量或激勵能，感應(yīng)器承擔(dān)將某個對象或過程的特定特性轉(zhuǎn)換成數(shù)量的工作。其"對象"可以是固體、液體或氣體，而它們的狀態(tài)可以是靜態(tài)的，也可以是動態(tài)(即過程)的。對象特性被轉(zhuǎn)換量化后可以通過多種方式檢測。對象的特性可以是物理性質(zhì)的，也可以是化學(xué)性質(zhì)的。按照其工作原理，它將對象特性或狀態(tài)參數(shù)轉(zhuǎn)換成可測定的電學(xué)量，然后將此電信號分離出來，送入感應(yīng)器系統(tǒng)加以評測或標(biāo)示。適用于半導(dǎo)體的生產(chǎn)和科研領(lǐng)域，讀 數(shù)誤差+/-3%
● 采用液晶背光顯示，可對正反向功率 及駐波比等進行三位半數(shù)字顯示
● 功率測試范圍可人工或自動設(shè)置，并有 GPIB和RS-232接口供選擇
功率范圍: 100mW-10kW
頻率范圍: 100kHz-2.5GHz
駐波比范圍: 1.0-199.9
讀數(shù)誤差: ±3%
功能: 測量正反向功率，通過W和dBm顯示:測量駐波比及回波損耗，通過dB顯示; 以及測量最大最小值 顯示: 三位半液晶背光顯示
工作電源: AC和電池兩種，115/230AC，50/60Hz或8節(jié)1.2V鎳鎘電池
尺寸: 312X309X108mm
接口選項: IEEE-488接口或RS-232接口
BIRD(鳥牌)4421功率計
Precision Power Meter for Semiconductor Processing Applications
• ±1% uracy - plished through the use of sensors with an
automatic frequency compensation scheme, where the error contributions
due to directional coupler frequency response characteristics are
eliminated.
• Wide Dynamic Range - The instrument will meet the full uracy
specification over a 35 dB dynamic range.
• Excellent Measurement Repeatability - Typically <0.1%
• Digital Display - Along with automatic VSWR calculation
• Computer Interface - RS-232 and IEEE-488 standard
The Bird® Model 4421 is a precision RF power meter that, while
originally intended for general purpose laboratory applications where
high uracy is required, has found wide eptance in semiconductor
processing applications. The product is configured as a system,
consisting of the Model 4421 digital display and a precision power
sensor selected for the application based upon maximum power
and operating frequency.
MODEL 4421 MULTIFUNCTION POWER METER
Power Range: 100 mW to 25 kW FS
Frequency Range : 100 kHz - 1 GHz
VSWR Range: 1.0 - 199.9
4020系列BIRD功率傳感器原理結(jié)構(gòu)
Functions : Forward and reflected power in W or dBm, VSWR,
return loss in dB and min./max. values
Overrange : Audible warning when RF power input exceeds
120% of sensor's maximum power range
Indication Display: 3 1/2 digit-liquid crystal display with indicator
for mode, measurement units, battery condition,
programming status, and trend arrows.
Switchable backlight.
Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride
1.2 V cells (NEDA type 10014)
Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H
(312 mm x 309 mm x 108 mm)
with handle extended 15 7/16" L (392 mm)
Weight : 11 lbs. (5 kg.)
Interconnects: 1 meter latch-n-lock coiled cable
Interfaces: IEEE-488 and RS-232 standard
Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm)
Required Product: RF Power Sensor
essories: Case 4300A215 (page 43)
19" Panel Mount Kit 4421-250
Latch & Lock Case 4421-038