目錄:上海西努光學(xué)科技有限公司>>自動化設(shè)備>>WDI MMS>> MMS LFOV
Increased Throughput & Efficiency
The use of sensitive large-format line scan sensors and new large field of view high resolution objectives enable semiconductor, FPD and electronics manufacturers to speed up the inspection process . These increases lead to greater manufacturing efficiencies and production throughput.
Field of View Optics
The MMS LFOV incorporates specialized components of WDI’s Modular Microscope System (MMS) engineered to support LFOV objectives and cameras. The system uses a motorized Z-Axis Actuator, MMS body and 1X Tube Lens which have been engineered to ensure the highest optical quality is maintained over the entire sensor.
Automated Focus and Illumination
The MMS LFOV is able to incorporate any one of WDIs Autofocus Sensors and illumination options to create a compley autonomous inspection system which can be controlled with a single control unit. The flexibility in autofocus and perfectly homogeneous illumination allows the to be used in a wide variety of manufacturing applications including semiconductor, FPD, OLED, packaging and photovoltaic and solar panel inspection.
Practical Design
To handle the high demands of manufacturing facilities, the features rugged industrial components, a small footprint and low weight, even when fully automated. Its modular nature allows it to be compley upgradable,
ensuring the best performance for all current and future applications.
LARGE FIELD OF VIEW MODULAR MICROSCOPE
| QIOPTIC 2X | Magnification | 2X |
| Numerical Aperture | 0.08 | |
| Working Distance | 24.8mm | |
| Field of View | 12.5mm | |
| QIOPTIC 5X | Magnification | 5X |
| Numerical Aperture | 0.2 | |
| Working Distance | 13.0mm | |
| Field of View | 5mm | |
| QIOPTIC 8X | Magnification | 8X |
| Numerical Aperture | 0.32 | |
| Working Distance | 7.0mm (estimated) | |
| Field of View | 3.125mm | |
| Motorized Z Actuator | Type | 1/32 Stepper Motor |
| Travel | 8mm (±4mm) | |
| Maximum Resolution | 0.156μm/step | |
| Maximum Speed | 10mm/sec | |
| Maximum Acceleration | 100 mm/s2 | |
| Autofocus | ATF-4, ATF-5 ATF-6, ATF-7 | |
| Illumination | ILL-WLED22, ILL-RLED22, ILL-GLED22, ILL-BLED22, ILL-4LED ILL-XESTR, ILL-XELED, ILL-HPLED | |
| Cameras/Sensor Support | Maximum Detector Diagonal | 25mm (1X Tube lens) |
| Electrical Requirements | 18V to 25V DC | 24V Nominal |
| Operating Temperature | 10°C ~ 30°C | Ambient |
| Operating Humidity | < 70% | Non Condensing |
(空格分隔,最多3個,單個標(biāo)簽最多10個字符)
9
化工儀器網(wǎng)